PECVD System
Tube furnace is a new type of electric furnace with high performance and high energy saving developed by adopting international advanced technology. There are many kinds of tube furnace types, such as single tube, double tube, horizontal, openable, vertical, single temperature zone, double temperature zone and three temperature zone. It is mainly used in experiments and small batch production in colleges, scientific research institutes, industrial and mining enterprises. The utility model has the advantages of safety and reliability, simple operation, high temperature control precision, good heat preservation effect, wide temperature range, high uniformity of furnace temperature, multiple temperature zones, optional atmosphere and vacuum furnace type
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  • Technical Features

    1. SUS304 is made of pure aluminum oxide and has high vacuum curing performance.

    2. A pair of slide rails are installed at the bottom of the furnace, which can move smoothly. It can slide from one end to the other manually to realize fast heating and cooling. The furnace cover can be opened to observe the heated materials in real time.

    3. Using high purity quartz tube, it has strong chemical stability, corrosion resistance and very small thermal expansion coefficient under high temperature.

    4. SUS304 stainless steel fast flange is adopted. High vacuum can be obtained by sealing tightly with high temperature "O" ring. One clamp can complete the connection of flange, and it is convenient and fast to put and take materials.

    5. The heating element is made of Cornell heating wire, with high surface load and durability. The maximum temperature is 1200 ℃ and the heating rate is 10 ℃ / min.

    6. Optional multi-channel mass flowmeter, digital display, automatic control of gas flow; built-in stainless steel gas mixing box, each gas pipeline is equipped with check valve, and the gas flow can be adjusted through the knob on the control panel.

    7. Plasma RF power supply: the maximum RF power is 500W, the output frequency is 13.56MHz ± 0.005%, the input power supply is 208-240vac, single-phase 50 / 60Hz.




  • Air supply systemRF power supply
    TypeNumber of channelsDimension(mm)W×H×LType of flowmeterTypePowerDimension(mm)W×H×LConfigure
    HTF-2F2230×260×390RotameterHTF-RF15 -300WAdjusted330×410×260Output power: 5-300w, RF power frequency: 13.56 MHz, maximum reverse power: 200W
    HTF-3F3290×490×450Rotameter
    HTF-4F4290×490×450Rotameter
    HTF-2M2430×460×590Mass flowmeterHTF-RF25 -500WAdjusted350×420×280Output power: 5-500w, RF power frequency: 13.56mh, maximum reverse power: 200W
    HTF-3M3430×460×590Mass flowmeter
    HTF-4M4430×460×590Mass flowmeter
    1200℃ Tube Furnace
    NumberTemp zoneTypeDia*tube size(mm)heating zone(mm)flat-temperature zone(mm)outer dia(mm)Max temp(℃)Working temp(℃)Power(kw)Voltage(V)
    B1SingleHTF1200-2.5/20φ25*450200100φ25120011001.7220
    B2HTF1200-5/20φ50*450200100φ50120011001.7220
    B3HTF1200-6/40φ60*1000400150φ60120011003220
    B4HTF1200-8/40φ80*1000400150φ80120011003220
    B5HTF1200-10/40φ100*1000400150φ100120011003220
    B6HTF1200-6/90φ60*1400900450φ60120011006220
    B7HTF1200-8/90φ80*1400900450φ80120011006220
    B8HTF1200-10/90φ100*1400900450φ100120011006220
    B9HTF1200-13/90φ130*1400900450φ130120011006220
    B10HTF1200-15/90φ150*1400900450φ150120011006220
    B11HTF1200-21/90φ210*1400900450φ210120011006220
    B12HTF1200-28/90φ280*1400900450φ280120011006220
    B3-2DoubleHTF1200-6/40-IIφ60*1000400200φ60120011004220
    B4-2HTF1200-8/40-IIφ80*1000400200φ80120011004220
    B5-2HTF1200-10/40-IIφ100*1000400200φ100120011004220
    B3-3TripleHTF1200-6/60-IIIφ60*1200600450φ60120011004220
    B4-3HTF1200-8/60-IIIφ80*1200600450φ80120011004220
    B5-3HTF1200-10/60-IIIφ100*1200600450φ100120011004220
    B6-3HTF1200-6/90-IIIφ60*1400900600φ60120011009220
    B7-3HTF1200-8/90-IIIφ80*1400900600φ80120011009220
    B8-3HTF1200-10/90-IIIφ100*1400900600φ100120011009220
    B9-3HTF1200-13/90-IIIφ130*1400900600φ130120011009220
    B10-3HTF1200-15/90-IIIφ150*1400900600φ150120011009220
    B11-3HTF1200-21/90-IIIφ210*1400900600φ210120011009220
    B12-3HTF1200-28/90-IIIφ280*1400900600φ280120011009220
    B6-5QuintupleHTF1200-6/90-Vφ60*1400900750φ60120011009220
    B7-5HTF1200-8/90-Vφ80*1400900750φ80120011009220
    B8-5HTF1200-10/90-Vφ100*1400900750φ100120011009220
    B9-5HTF1200-13/90-Vφ130*1400900750φ130120011009220
    B10-5HTF1200-15/90-Vφ150*1400900750φ150120011009220
    B11-5HTF1200-21/90-Vφ210*1400900750φ210120011009220
    B12-5HTF1200-28/90-Vφ280*1400900750φ280120011009220
    1400℃ Tube Furnace
    NumberTemp zoneTypeDia*tube size(mm)heating zone(mm)flat-temperature zone(mm)outer dia(mm)Max temp(℃)Working temp(℃)Power(kw)Voltage(V)
    B3SingleHTF1400-6/30φ60*1000300150φ60140013007220
    B4HTF1400-8/30φ80*1000300150φ80140013007220
    B5HTF1400-10/30φ100*1000300150φ100140013007220
    B3-2DoubleHTF1400-6/40-IIφ60*1000200+200250φ60140013007220
    B4-2HTF1400-8/40-IIφ80*1000200+200250φ80140013007220
    B5-2HTF1400-10/40-IIφ100*1000200+200250φ100140013007220
    B3-3TripleHTF1400-6/60-IIIφ60*1200600450φ60140013009220
    B4-3HTF1400-8/60-IIIφ80*1200600450φ80140013009220
    B5-3HTF1400-10/40-IIIφ100*1200600450φ100140013009220
    1600℃ Tube Furnace
    NumberTemp zoneTypeDia*tube size(mm)heating zone(mm)flat-temperature zone(mm)outer dia(mm)Max temp(℃)Working temp(℃)Power(kw)Voltage(V)
    B3SingleHTF1600-6/30φ60*1000300150φ60160015007220
    B4HTF1600-8/30φ80*1000300150φ80160015007220
    B5HTF1600-10/30φ100*1000300150φ100160015007220
    B3-2DoubleHTF1600-6/40-IIφ60*1000400250φ60160015007220
    B4-2HTF1600-8/40-IIφ80*1000400250φ80160015007220
    B5-2HTF1600-10/40-IIφ100*1000400250φ100160015007220
    B3-3TripleHTF1600-6/60-IIIφ60*1200600450φ60160015009220
    B4-3HTF1600-8/60-IIIφ80*1200600450φ80160015009220
    B5-3HTF1600-10/60-IIIφ100*1200600450φ100160015009220
    1700℃/1750℃ Tube Furnace
    NumberTemp zoneTypeDia*tube size(mm)heating zone(mm)flat-temperature zone(mm)outer dia(mm)Max temp(℃)Working temp(℃)Power(kw)Voltage(V)
    B3SingleHTF1700-6/30φ60*1000300150φ60170016007220
    B4HTF1700-8/30φ80*1000300150φ80170016007220
    B3-2DoubleHTF1700-6/40-IIφ60*1000400250φ60170016007220
    B4-2HTF1700-8/40-IIφ80*1000400250φ80170016007220
    B5-2HTF1700-10/40-IIφ100*1000400250φ100170016007220
    B3-3TripleHTF1700-6/60-IIIφ60*1200600450φ60170016009220
    B4-3HTF1700-8/60-IIIφ80*1200600450φ80170016009220
    B5-3HTF1700-10/60-IIIφ100*1200600450φ100170016009220
    B1SingleHTF1750-5/20φ50*800200100φ50175017004220
    B2HTF1750-6/20φ60*800200100φ60175017004220
    B1HTF1800-5/20φ50*800200100φ50180017504220
    B2HTF1800-6/20φ60*800200100φ60180017504220

    Vertical Tube Furnace
    NumberTypeDia*tube size(mm)heating zone(mm)flat-temperature zone(mm)outer dia(mm)Max temp(℃)Working temp(℃)Power(kw)Voltage(V)
    B1HTF1200-2.5/20-VTφ25*4502008025120011001.7220
    B2HTF1200-5/20-VTφ50*4502008050120011001.7220
    B3HTF1200-6/40-VTφ60*100040015060120011001.7220
    B4HTF1200-8/40-VTφ80*100040015080120011001.7220
    B3HTF1400-6/30-VTφ60*1000300150φ60140013007220
    B4HTF1400-8/30-VTφ80*1000300150φ80140013007220
    B3HTF1400-6/30-VTφ60*1000300150φ60140013007220
    B4HTF1400-8/30-VTφ80*1000300150φ80140013007220
    Rotate Tube Furnace
    NumberTypeDia*tube size(mm)heating zone(mm)flat-temperature zone(mm)outer dia(mm)Max temp(℃)Working temp(℃)Power(kw)Voltage(V)
    B3HTF1200-6/40-Rφ60*1000400150φ60120011003220
    B4HTF1200-8/40-Rφ80*1000400150φ80120011003220
    B3HTF1200-6/40-II-Rφ60*1000400200φ60120011003220
    B4HTF1200-8/40-II-Rφ80*1000400200φ80120011003220
    B3HTF1200-6/40-II-Rφ60*1000400200φ60120011003220
    B4HTF1200-8/40-II-Rφ80*1000400200φ80120011003220
    B3HTF1400-6/40-II-Rφ60*1000400200φ60140013007220
    B4HTF1400-8/40-II-Rφ80*1000400200φ80140013007220
    B3HTF1600-6/30-Rφ60*1000300150φ60160015007220
    B4HTF1600-8/30-Rφ80*1000300150φ80160015007220
    B3HTF1600-6/40-II-Rφ60*1000400200φ60160015007220
    B4HTF1600-8/40-II-Rφ80*1000400200φ80160015007220
    1200C Fast Annealing Furnace
    NumberTypeDia*tube size(mm)heating zone(mm)flat-temperature zone(mm)outer dia(mm)Max temp(℃)Working temp(℃)Power(kw)Voltage(V)
    B3HTF1200-6/40-Lφ60*1000400150φ60120011003220
    B4HTF1200-8/40-Lφ80*1000400150φ80120011003220
  • Application

    High vacuum CVD system is a special equipment for growing high-quality graphene, carbon nanotubes and silicon carbide on the bottom materials. It is widely used in the fields of semiconductor, nano materials, carbon fiber, silicon carbide, coating and other new materials.


  • Main components
    Heating ElementsAlloy resistance wire/SiC rod/MoSi2 rod

    合金电阻丝.jpg硅碳棒.jpg硅钼棒.jpg

    Chamber materialAlumina polycrystalline fiber / ceramic fiber

    氧化铝多晶纤维.jpg陶瓷纤维.jpg

    Tube materialHigh purity corundum tube / quartz tube

    刚玉管.jpg石英管.jpg

    Flow monitorRotameter / mass flowmeter

    浮子流量计.jpg质量流量计.jpg

    Vacuum degreeMechanical pump:10-2torr(≤20Pa)

    机械泵.jpg

    Molecular pump:10-5torr(≤0.005Pa)

    分子泵.jpg

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